I have just spent some time trying to find an earlier version of the "Ghoulies and ghosties..." litany. It must have been around in some form in Shakespeare's time, as the fairies' song in Act 2, Scene 2 of Midsummer Night's Dream contains a similar sentiment. It is a lullaby sung by the fairies to Titania:

You spotted snakes with double tongue,
Thorny hedgehogs, be not seen.
Newts and blindworms, do no wrong.
Come not near our fairy queen.

[Chorus] Philomel, with melody
Sing in our sweet lullaby;
Lulla, lulla, lullaby, lulla, lulla, lullaby:
Never harm,
Nor spell nor charm,
Come our lovely lady nigh;
So, good night, with lullaby.

Weaving spiders, come not here;
Hence, you long-legg'd spinners, hence!
Beetles black, approach not near;
Worm nor snail, do no offense.

[Chorus]

I found this version in Walker, Archibald Stodard. The Beggar’s Wallet: Containing Contributions in Prose, Verse and Pictorial Illustration, Gathered from Certain Workers in Arts and Letters. Edinburgh: The Royal Victoria Hospital for Consumption, 1905, p. 163:

“From Ghaisties, Ghoulies, and long-leggity Beasties and Things that go Bump in the night - Good Lord, deliver us.”

I agree with others that it must have been in circulation much earlier than 1905.